Seminars & Events

Mathematics and Computer Science Division
"Cluster Ion Beam Technology: Review of Current and Prospective Applications"

DATE: August 24, 2011 to August 24, 2011
TIME: 10:00 AM - 11:00 AM
SPEAKER: Prof. I. Yamada , Kyoto University/University of Hyogo
LOCATION: Building 212/Conference room A157, Argonne National Laboratory
HOST: Zinetula (Zeke) Insepov

Description:
Cluster ion beam processes which employ ions comprised of a few hundred to several thousand atoms are being developed into a new field of ion beam technology. The processes are characterized by low energy surface interaction effects, lateral sputtering phenomena and high-rate chemical reaction effects. At the seminar, the current status of compact GCIB equipment development, studies of the fundamental cluster ion beam characteristics as they apply to nanoscale processing and present industrial applications will be reviewed. As new prospective applications, techniques are now being developed to employ cluster ions in surface analysis tools such as XPS and SIMS and to modify surfaces of bio-materials. Results related to these new projects will also be reviewed.

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